The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Aug. 03, 2017
Applicant:
Trumpf Huettinger Sp. Z O. O., Zielonka, PL;
Inventors:
Marcin Zelechowski, Warsaw, PL;
Piotr Lach, Wolomin, PL;
Assignee:
TRUMPF Huettinger Sp. z o. o., Zielonka, PL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/12 (2006.01); H01J 37/24 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3476 (2013.01); G01R 31/1254 (2013.01); H01J 37/241 (2013.01); H01J 37/244 (2013.01); H01J 37/32944 (2013.01); H01J 37/3444 (2013.01); H01J 2237/0206 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/3322 (2013.01);
Abstract
An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value.