The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Aug. 06, 2015
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); C30B 29/40 (2006.01); C30B 19/12 (2006.01); H01L 21/205 (2006.01); C30B 1/02 (2006.01); C30B 1/10 (2006.01); C30B 9/12 (2006.01); C30B 19/02 (2006.01); C30B 19/08 (2006.01); C30B 29/20 (2006.01); H01L 21/02 (2006.01); C30B 5/02 (2006.01); C30B 25/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/403 (2013.01); C30B 1/02 (2013.01); C30B 1/10 (2013.01); C30B 5/02 (2013.01); C30B 9/12 (2013.01); C30B 19/02 (2013.01); C30B 19/08 (2013.01); C30B 19/12 (2013.01); C30B 25/02 (2013.01); C30B 29/20 (2013.01); H01L 21/0242 (2013.01); H01L 21/0254 (2013.01); H01L 21/02491 (2013.01); H01L 21/02499 (2013.01); H01L 21/02502 (2013.01); H01L 21/02628 (2013.01); H01L 21/205 (2013.01);
Abstract
An alumina substrate wherein an AlN layer is formed on a surface of the alumina substrate and a rare earth elements-containing layer and/or rare earth elements-containing regions is/are formed in the interior of the AlN layer or in the interface between the AlN layer and the alumina substrate.