The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Jan. 30, 2018
Taiwan Carbon Nano Technology Corporation, Miaoli County, TW;
Yu-Hsuan Liao, Miaoli County, TW;
Fang-Song Tsai, Miaoli County, TW;
Ya-Han Wu, Miaoli County, TW;
Chun-Hsien Tsai, Miaoli County, TW;
Ting-Chuan Lee, Miaoli County, TW;
Chun-Jung Tsai, Miaoli County, TW;
Taiwan Carbon Nano Technology Corporation, Miaoli County, TW;
Abstract
A method for manufacturing a gas detector by a micro-electrical-mechanical systems (MEMS) process. The method includes providing a MEMS wafer including a plurality of mutually adjacent units; forming a gas sensing material layer on the MEMS wafer; bonding a structure reinforcing layer and the MEMS wafer through anode bonding; providing an adhesive tape; performing a cutting process to form a gas detection unit; and adhering the gas detection unit on a substrate by the adhesive tape to form a gas detector. The structure reinforcing layer is capable of enhancing the strength of a device and preventing edge collapsing, and hence enhancing the overall yield rate and reducing costs.