The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2019

Filed:

Jun. 19, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takeshi Honma, Tokyo, JP;

Toshiki Ito, Kawasaki, JP;

Shiori Yonezawa, Tokyo, JP;

Keiko Chiba, Utsunomiya, JP;

Keiji Yamashita, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/02 (2006.01); C08F 2/44 (2006.01); C08F 2/50 (2006.01); C08F 220/18 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/266 (2006.01); B29C 59/00 (2006.01); C08L 33/08 (2006.01); B29C 33/62 (2006.01); C08F 222/10 (2006.01); B29K 33/00 (2006.01); B29K 105/00 (2006.01);
U.S. Cl.
CPC ...
B29C 59/026 (2013.01); B29C 33/62 (2013.01); B29C 59/002 (2013.01); B29C 59/005 (2013.01); C08F 2/44 (2013.01); C08F 2/50 (2013.01); C08F 220/18 (2013.01); C08L 33/08 (2013.01); G03F 7/0002 (2013.01); H01L 21/0271 (2013.01); H01L 21/266 (2013.01); B29K 2033/08 (2013.01); B29K 2105/0005 (2013.01); C08F 222/1006 (2013.01); C08K 2201/00 (2013.01);
Abstract

In an imprint method in a condensable gas atmosphere, the force (mold releasing force) required to separate a mold from a resist cured film (mold release) has been large. A photocurable composition for performing imprint in an atmosphere containing a condensable gas includes a component (A) which is a (meth)acrylate monomer; a component (B) which is a photopolymerization initiator; and a component (C) which is a mold releasing agent. The saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 50% by weight or more, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.


Find Patent Forward Citations

Loading…