The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Apr. 28, 2016
Applicant:
Chirp Microsystems, Berkeley, CA (US);
Inventors:
Andre Guedes, Lisbon, PT;
David Horsley, Albany, CA (US);
Meng-Hsiung Kiang, Albany, CA (US);
Richard Przybyla, Berkeley, CA (US);
Stefon Shelton, Oakland, CA (US);
Assignee:
CHIRP MICROSYSTEMS, Berkeley, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); B81B 3/00 (2006.01); G01N 29/24 (2006.01); H03H 9/24 (2006.01); H01L 41/33 (2013.01);
U.S. Cl.
CPC ...
B06B 1/0625 (2013.01); B06B 1/0603 (2013.01); B81B 3/00 (2013.01); G01N 29/2437 (2013.01); H01L 41/33 (2013.01); H03H 9/2447 (2013.01);
Abstract
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.