The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2019

Filed:

Feb. 24, 2016
Applicant:

Sharp Kabushiki Kaisha, Sakai, Osaka, JP;

Inventors:

Toshihiko Sakai, Sakai, JP;

Takeshi Kamikawa, Sakai, JP;

Masatomi Harada, Sakai, JP;

Tokuaki Kuniyoshi, Sakai, JP;

Liumin Zou, Sakai, JP;

Assignee:

SHARP KABUSHIKI KAISHA, Sakai, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); B05D 3/04 (2006.01); C23C 14/50 (2006.01); C23C 16/04 (2006.01); C23C 16/44 (2006.01); H01L 21/56 (2006.01); H01L 21/67 (2006.01); H01L 31/20 (2006.01);
U.S. Cl.
CPC ...
B05D 3/0493 (2013.01); C23C 14/04 (2013.01); C23C 14/50 (2013.01); C23C 16/04 (2013.01); C23C 16/44 (2013.01); H01L 21/56 (2013.01); H01L 21/67201 (2013.01); H01L 21/67207 (2013.01); H01L 31/202 (2013.01); H01L 31/204 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11);
Abstract

A film-forming method for forming a thin film on a substrate includes a contact step, an external force removal step, and a film-forming step. At the contact step (step B), the substrateand a memberin contact with one surface of the substrate is stacked, and the substrateand the memberin contact with one surface of the substrate are placed under vacuum while an external force is applied in a direction in which the substrateand the memberin contact with one surface of the substrate are stacked. At the external force removal step (step C), the external force is removed at atmospheric pressure or under vacuum. At a film-forming step (step E), a thin film is formed on the one surface or the other surface of the substrate


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