The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Mar. 17, 2016
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventors:
Hiroshi Yamada, Nagaokakyo, JP;
Keiichi Umeda, Nagaokakyo, JP;
Takehiko Kishi, Nagaokakyo, JP;
Toshio Nishimura, Nagaokakyo, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 3/007 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/171 (2013.01); H03H 3/0072 (2013.01); H03H 3/02 (2013.01); H03H 9/02448 (2013.01); H03H 9/2484 (2013.01); H03H 9/2489 (2013.01); H03H 2003/027 (2013.01); H03H 2009/02503 (2013.01); H03H 2009/02511 (2013.01); H03H 2009/241 (2013.01);
Abstract
A vibration device that includes a support member, vibration arms connected to the support member and each having an n-type Si layer which is a degenerate semiconductor, and electrodes provided so as to excite the vibration arms, and silicon oxide films containing impurities in contact with a respective lower surface of the n-type Si layers of each vibration arm.