The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2019

Filed:

Feb. 08, 2016
Applicant:

Hitachi Kokusai Electric Inc., Tokyo, JP;

Inventors:

Naoya Fujimoto, Tokyo, JP;

Yoshiyuki Oshida, Tokyo, JP;

Norikazu Kato, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 7/38 (2006.01); H03H 7/40 (2006.01); H03H 11/30 (2006.01); H01J 37/32 (2006.01); H01P 5/18 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H03H 7/383 (2013.01); H01J 37/32183 (2013.01); H01P 5/18 (2013.01); H03H 7/40 (2013.01); H03H 11/30 (2013.01); H05H 2001/4682 (2013.01);
Abstract

A matching device includes: a directional coupler that detects a traveling wave and a reflected wave; a matching circuit that has a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit that calculates a reflection coefficient based on the traveling wave and the reflected wave and controls a capacitance value VCof the first variable capacitance capacitor and a capacitance value VCof the second variable capacitance capacitor. The control unit changes VCsuch that VCmoves toward a circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, fine-tunes VCon the basis of a predicted intersection point with the circle, and when the distance between the calculated reflection coefficient and the circle becomes a predetermined value or less, changes VCsuch that the calculated reflection coefficient approaches zero, and fine-tunes VC


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