The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2019

Filed:

Jan. 12, 2017
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventors:

Sho Nakanishi, Ibaraki, JP;

Yuji Fujii, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/739 (2006.01); H01L 21/04 (2006.01); H01L 29/45 (2006.01); H01L 21/265 (2006.01); H01L 23/535 (2006.01); H01L 27/06 (2006.01); H01L 29/08 (2006.01); H01L 29/36 (2006.01); H01L 29/66 (2006.01); H01L 29/417 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 21/043 (2013.01); H01L 21/0485 (2013.01); H01L 21/265 (2013.01); H01L 21/28518 (2013.01); H01L 23/535 (2013.01); H01L 27/0635 (2013.01); H01L 29/083 (2013.01); H01L 29/0834 (2013.01); H01L 29/36 (2013.01); H01L 29/417 (2013.01); H01L 29/45 (2013.01); H01L 29/456 (2013.01); H01L 29/66348 (2013.01);
Abstract

A performance of a semiconductor device including an RC-IGBT is improved. An AlNiSi layer (a layer containing aluminum (Al), nickel (Ni), and silicon (Si)) is formed between a back surface of a semiconductor substrate and a back surface electrode. Thus, a favorable ohmic junction can be obtained between the back surface electrode and an N-type layer constituting a cathode region in an embedded diode, and a favorable ohmic junction can be obtained between the back surface electrode and a P-type layer constituting a collector region in an IGBT. The AlNiSi layer contains 10 at % or more of each of the aluminum (Al), the nickel (Ni), and the silicon (Si).


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