The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Jul. 31, 2015
Applicant:
Katholieke Universiteit Leuven, Leuven, BE;
Inventors:
Jean-Pierre Locquet, Haasrode, BE;
Chen-Yi Su, Taoyuan, TW;
Assignee:
KATHOLIEKE UNIVERSITEIT LEUVEN, Leuven, BE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 13/02 (2006.01); H01L 21/67 (2006.01); C23C 14/22 (2006.01); C23C 14/58 (2006.01); C23C 16/56 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); C23C 14/228 (2013.01); C23C 14/5806 (2013.01); C23C 16/56 (2013.01); H01L 21/02175 (2013.01); H01L 21/02178 (2013.01); H01L 21/02266 (2013.01); H01L 21/02337 (2013.01); H01L 21/02356 (2013.01); H01L 21/02527 (2013.01); H01L 21/02529 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01); H01L 21/02689 (2013.01); H01L 21/68714 (2013.01);
Abstract
A heating device for heating the surface of a substrate. The heating device comprises a gas source comprising an inert material supply inert under the operating conditions of the heating device, the gas source being adapted for supplying a hot jet of a gas comprising at least elements of said inert material on the substrate. The gas source is adapted for heating the hot jet of the gas to a temperature above 1500° C.