The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Nov. 05, 2010
Horst Muegge, Weinheim, DE;
Klaus-martin Baumgärtner, Fränkisch-Crumbach, DE;
Mathias Kaiser, Karlsbad, DE;
Lukas Alberts, Ludwigsburg, DE;
Horst Muegge, Weinheim, DE;
Klaus-Martin Baumgärtner, Fränkisch-Crumbach, DE;
Mathias Kaiser, Karlsbad, DE;
Lukas Alberts, Ludwigsburg, DE;
Muegge GmbH, Reichelsheim, DE;
Abstract
A device is provided for generating plasma by microwaves for CVD coating a substrate having a vacuum container into which a reaction gas can be fed and an electrical conductor arranged therein which is connected on each of both ends thereof to a device for coupling microwaves and to a voltage source with which a difference of potential can generated between the electrical conductor and the surrounding vacuum container. The electrical conductor is electrically insulated from the devices for coupling microwaves. The electrical conductor has a rod-shaped design or a curved run. The electrical conductor is connected to the voltage source via a feedthrough filter. The device for coupling microwaves expands in a funnel shape toward the electrical conductor and is partially or completely filled by a dielectric material. The device for coupling microwaves has groove-shaped recesses running along a circumference.