The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Nov. 02, 2016
Endress+hauser Gmbh + Co. KG, Maulburg, DE;
Timo Kober, Dietzenbach, DE;
Michael Philipps, Lorrach, DE;
Dieter Stolze, Potsdam, DE;
Anh Tuan Tham, Berlin, DE;
Roland Werthschutzky, Kleinmachnow, DE;
ENDRESS+HAUSER SE+CO.KG, Maulburg, DE;
Abstract
The pressure sensor of the invention includes at least one platform, at least one measuring membrane, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bedhas a glass layer, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membranein the case of overload, characterized in that the contour of the membrane bedis obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate.