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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10287685 B1

PDFFull Text
Date of Patent:
May. 14, 2019

Filed:

Aug. 29, 2014

Susceptor

Applicant:

Bridgestone Corporation, Tokyo, JP;

Inventors:

Fumiya Kobayashi, Tokyo, JP;

Sho Kumagai, Tokyo, JP;

Kazuhiro Ushita, Tokyo, JP;

Tadashi Onishi, Tokyo, JP;

Tomonori Ishigaki, Tokyo, JP;

Assignee:

MARUWA CO., LTD., Owariasahi, Aichi, JP;

Attorney:

Shumaker, Loop & Kendrick, LLP

Primary Examiner:

Tyrone V Hall, Jr

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4581 (2013.01); C23C 16/4584 (2013.01); H01L 21/67103 (2013.01); H01L 21/68735 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01);
Abstract

Provided is a susceptor capable of achieving improved thermal uniformity while suppressing reduction in its temperature increase rate and heat utilization efficiency. A susceptor includes a plate-shaped first member including a wafer placement surface on which to place a wafer, and a second member supporting the first member and laid on the first member in the direction perpendicular to the wafer placement surface. The thermal conductivity of the first member is higher than the thermal conductivity of the second member.

Find Patent Forward Citations

Kobayashi, Fumiya. (2019). Susceptor (U.S. Patent No. 10287685). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10287685

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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