The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2019

Filed:

Jun. 19, 2015
Applicant:

Toto Ltd., Kitakyushu-Shi, Fukuoka, JP;

Inventor:

Junichi Iwasawa, Fukuoka-Ken, JP;

Assignee:

Toto Ltd., Fukuoka, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 4/12 (2016.01); C04B 35/505 (2006.01); C04B 41/87 (2006.01); C23C 24/04 (2006.01); C04B 35/622 (2006.01); C04B 41/00 (2006.01); C04B 41/50 (2006.01); C04B 111/00 (2006.01);
U.S. Cl.
CPC ...
C04B 35/505 (2013.01); C04B 35/62222 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); C04B 41/87 (2013.01); C23C 4/12 (2013.01); C23C 24/04 (2013.01); C04B 2111/0025 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/76 (2013.01); C04B 2235/762 (2013.01); C04B 2235/77 (2013.01); C04B 2235/781 (2013.01); C04B 2235/80 (2013.01); Y02T 50/6765 (2018.05);
Abstract

There is provided a plasma-resistant member, including: a base material; and a layer structural component formed by aerosol deposition at a surface of the base material, the layer structural component being plasma-resistant and including an yttria polycrystalline body, the yttria polycrystalline body included in the layer structural component having a crystal structure in which cubic and monoclinic coexist, a proportion of monoclinic to cubic inside the yttria polycrystalline body included in the layer structural component being not less than 0% and not more than 60%, a crystallite size of the yttria polycrystalline body included in the layer structural component being not less than 8 nm and not more than 50 nm.


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