The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Dec. 30, 2015
L'air Liquide, Societe Anonyme Pour L'etude ET L'exploitation Des Procedes Georges Claude, Paris, FR;
Satoko Gatineau, Seoul, KR;
Grigory Nikiforov, Kanata, CA;
Abstract
Disclosed are methods for purification of a crude TiIfor deposition of Ti-containing films including evaporating volatile impurities in the crude TiIunder vacuum at room temperature in a sublimator and removing the volatile impurities, placing the sublimator in a hot oil bath under vacuum at a temperature to evaporate TiIand form powders or a solid, and sublimating the powers or the solid under vacuum at the temperature to obtain the purified TiI. Disclosed are methods for storage of a pure TiIincluding drying a stainless-steel canister, instantaneously moving the dried stainless steel canister into a glove box under inert atmosphere at room temperature, moving the pure TiIinto the glove box, filling the pure TiIinto the dried stainless-steel canister, and sealing the dried stainless steel canister containing the pure TiIwith metallic sealing.