The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2019

Filed:

Nov. 29, 2016
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Junya Matsuoka, Hamamatsu, JP;

Nobuaki Tsuji, Hamamatsu, JP;

Yuki Ueya, Hamamatsu, JP;

Tsuyoshi Okami, Hamamatsu, JP;

Takashi Mizota, Hamamatsu, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/02 (2013.01); B81B 3/00 (2006.01); G01C 19/5769 (2012.01); H01L 29/84 (2006.01); B81C 1/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0013 (2013.01); B81B 3/00 (2013.01); B81C 1/00968 (2013.01); G01C 19/5769 (2013.01); G01P 15/02 (2013.01); H01L 29/84 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); G01P 2015/0871 (2013.01);
Abstract

A MEMS device including a fixed member and a movable member supported via a resilient body. The MEMS device includes an impact alleviation mechanism provided at a position where the movable member and the fixed member collide during operation. The impact alleviation mechanism includes a stopper provided to either the fixed member or the movable member and that protrude to be parallel between sides of the two members with at least one side edge fixed to the respective member. Moreover, the impact alleviation mechanism includes an elongate protruding member provided on the other of the fixed member and the movable member. The elongate protruding member and the stopper are configured such that as collision force increases between the movable member and the fixed member during operation, an abutment area of an outer edge position of the elongate protruding member approaches the fixed side edge of the stopper.


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