The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Jul. 01, 2016
Fujikoshi Machinery Corp., Nagano-shi, Nagano, JP;
Mitsuhiro Hara, Nagano, JP;
Ryosuke Yoda, Nagano, JP;
FUJIKOSHI MACHINERY CORP., Nagano-Shi, Nagano, JP;
Abstract
To provide a dressing apparatus capable of uniformly dressing a polishing pad. The apparatus includes first and second dressing grind stonesandwhich grind polishing padsandby moving in a radial direction of upper and lower polishing platesandwhile abutting on corresponding polishing padsandin which the first and second dressing grind stonesandare set so as to have: an inner side region portion P; an outer side region portion Q; and an intermediate region portion R, wherein the length of each of the inner side region portion P and the outer side region portion Q extending in a circumferential direction of the polishing platesandis longer than the length of the intermediate region portion R extending in a circumferential direction of the polishing plates.