The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Sep. 09, 2016
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Litho Tech Japan Corporation, Kawaguchi, Saitama, JP;
Oriental Motor Co., Ltd., Tokyo, JP;
Shuuji Okuda, Tsukuba, JP;
Sommawan Khumpuang, Tsukuba, JP;
Shiro Hara, Tsukuba, JP;
Sho Takeuchi, Saitama, JP;
Yoshihisa Sensu, Saitama, JP;
Takahiro Ito, Tsukuba, JP;
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo, JP;
LITHO TECH JAPAN CORPORATION, Kawaguchi, JP;
ORIENTAL MOTOR CO., LTD., Tokyo, JP;
Abstract
A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.