The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2019

Filed:

Feb. 20, 2017
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Inventor:

Takayuki Fukushima, Takarazuka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B25J 11/0095 (2013.01); B25J 15/0014 (2013.01); H01L 21/67766 (2013.01); H01L 21/67796 (2013.01); H01L 21/68742 (2013.01);
Abstract

A substrate gripping hand includes: a base plate wherein a center line and gripping position are prescribed; at least one fixed claw capable of mating with a substrate edge in the gripping position and provided at a base plate distal end side; a movable claw having an acting portion acting on a substrate edge in gripping position and movable back-and-forth on center line; a pusher having an acting portion acting on an edge lower than the substrate center in a perpendicular orientation and movable back-and-forth parallel with the center line; and an actuator for moving the movable claw and pusher. The pusher acting portion is positioned more to the distal end side than the movable claw acting portion such that the substrate is grasped by the movable claw joint operation and the fixed claw after the substrate is brought to gripping position by the pusher moving forward toward the distal end side.


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