The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Apr. 06, 2018
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Manabu Takakuwa, Tsu, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); H01L 21/67 (2006.01); G03F 7/20 (2006.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); G03F 7/70141 (2013.01); G03F 9/7003 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01);
Abstract
According to one embodiment, an alignment method includes calculating a position gap of a predetermined point in a device area of a wafer based on a stress applied to the device area, and correcting an exposure condition in a lithography process of the device area based on the position gap of the predetermined point.