The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Feb. 19, 2016
Eugene Technology Co., Ltd., Yongin-si, Gyeonggi-do, KR;
Jun-Jin Hyon, Gunpo-si, KR;
Joo-Hyun Cho, Yongin-si, KR;
Chul-Goo Kang, Seongnam-si, KR;
Yong-Ki Kim, Pyeongtaek-si, KR;
Jung-Ki Min, Yongin-si, KR;
EUGENE TECHNOLOGY CO., LTD., Yongin-si, Gyeonggi-Do, KR;
Abstract
Provided is a method for multi-supplying gas, the method comprising: installing a control valve and an flow meter on each of a plurality of branch lines branched from a main supply line, in which one or more gases are supplied, and supplying the gas; and providing the gas by adjusting flow of the gas by a controller connected to each of the control valve and the flow meter, wherein the controller has a first control manner, which controls each of the control valves based on a rate of flow measured by the flow meter to required portion flow for each branch line, and the first control manner adjusts an open rate of the control valve if the rate of the measured flow to the required portion flow is not within a predetermined range, and a unit of adjusting the control valve increases or decreases according to a difference between the measured flow and the required portion flow.