The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2019

Filed:

Oct. 23, 2014
Applicant:

Shenzhen Jingjiang Yunchuang Technology, Co., Ltd., Shenzhen, CN;

Inventors:

Tang-Quan Chen, Shenzhen, CN;

Kai Luo, Shenzhen, CN;

Xiao-Bo Yuan, Shenzhen, CN;

Yi-Min Jiang, Shenzhen, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F24F 13/10 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67126 (2013.01);
Abstract

A processing room includes a processing chamber, a discharge chamber, a sealing member, a blocking member, and a reclaiming member. The discharge chamber includes a main body communicating with the processing chamber, and a receiving portion and a discharge portion communicating with the main body. The receiving portion is aligned to the discharge portion. The sealing member includes a sealing portion and a sealing valve mounted on the sealing portion. The sealing portion is partially and moveably received in the receiving portion and resists against a sidewall of the receiving portion. The blocking member is detachably mounted on an end of the discharge portion and seals the discharge portion. The reclaiming member is partially received in the main body.


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