The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Mar. 21, 2017
Sandisk Technologies Llc, Plano, TX (US);
Takeshi Watanabe, Yokkaichi, JP;
Yoshihiro Nagura, Yokkaichi, JP;
Kouta Fujikawa, Yokkaichi, JP;
Hitoshi Suzuki, Yokkaichi, JP;
SANDISK TECHNOLOGIES LLC, Plano, TX (US);
Abstract
A wet chemical processing tool is provided, which includes an assembly of a container and at least three nozzles. The container includes a volume configured to contain at least one substrate therein. The wet chemical processing tool includes a flow controller configured to actuate and de-actuate flow of the liquid through each of the at least three nozzles. The flow controller can be operated by an automated program that includes a plurality of wet processing steps. At least two of the plurality of wet processing steps generate a respective unique processing-step vortex flow pattern by de-actuating flow of the liquid from a respective set of at least one deactivated nozzle selected from the at least three nozzles while actuating each of the at least three nozzles that does not belong to the set of at least one deactivated nozzle.