The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Jan. 20, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Jason M. Schaller, Austin, TX (US);
Robert Brent Vopat, Austin, TX (US);
Paul E. Pergande, Austin, TX (US);
Benjamin B. Riordon, Newburyport, MA (US);
David T. Blahnik, Round Rock, TX (US);
William T. Weaver, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus and methods for heating and cooling a plurality of substrate wafers are provided. LED lamps are positioned against the back sides of a plurality of cold plates. In some embodiments, wafers are supported on a wafer lift which can move all wafers together. In some embodiments, wafers are supported on independent lift pins which can move individual wafers for heating and cooling. Some embodiments of the disclosure provide for decreased time between wafer switching in a processing chamber.