The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Sep. 22, 2014
Applicant:
The Regents of the University of Colorado, a Body Corporate, Denver, CO (US);
Inventors:
Steven M. George, Boulder, CO (US);
Andrew S. Cavanagh, Boulder, CO (US);
Assignee:
The Regents of the University of Colorado, a body corporate, Denver, CO (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/30 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02381 (2013.01); C23C 16/303 (2013.01); C23C 16/345 (2013.01); C23C 16/402 (2013.01); C23C 16/4554 (2013.01); H01L 21/0217 (2013.01); H01L 21/0228 (2013.01); H01L 21/0254 (2013.01); H01L 21/0259 (2013.01); H01L 21/0262 (2013.01); H01L 21/02164 (2013.01); H01L 21/02266 (2013.01); H01L 21/02532 (2013.01); H01L 21/02631 (2013.01);
Abstract
The invention includes a method of promoting thin film growth on a solid substrate, wherein derivatization of the substrate comprises formation of at least one surface species. In certain embodiments, the method comprises desorbing the surface species from the substrate using electron stimulated desorption (ESD).