The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2019

Filed:

Mar. 06, 2017
Applicant:

Enraytek Optoelectronics Co., Ltd., Shanghai, CN;

Inventors:

Houyong Ma, Shanghai, CN;

Jing Ju, Shanghai, CN;

Zhengzhang You, Shanghai, CN;

Qiming Li, Shanghai, CN;

Jingchao Xie, Shanghai, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 33/02 (2006.01); C30B 29/20 (2006.01); C30B 33/10 (2006.01); B08B 3/08 (2006.01); B08B 7/00 (2006.01); B08B 7/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02079 (2013.01); B08B 3/08 (2013.01); B08B 7/0071 (2013.01); B08B 7/04 (2013.01); C30B 29/20 (2013.01); C30B 33/02 (2013.01); C30B 33/10 (2013.01);
Abstract

A method for recycling a sapphire substrate is disclosed. The method includes the steps of: high-temperature baking, wherein an intact epitaxial wafer to be scrapped is placed and baked in a baking oven at a high temperature of from 600° C. to 1000° C., and wherein the epitaxial wafer contains the sapphire substrate; and high-temperature rinsing in a concentrated acid, wherein the baked epitaxial wafer is then rinsed in the concentrated acid having a concentration ranging from 60% to 99% at a high temperature of from 160° C. to 300° C. The method can be used for recycling both patterned and smooth sapphire substrates.


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