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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10283322 B1

PDFFull Text
Date of Patent:
May. 07, 2019

Filed:

Mar. 26, 2015

Method and device for generating a plasma excited by a microwave energy in the electron cyclotron resonance (ecr) domain, in order to carry out a surface treatment or produce a coating around a filiform element

Applicants:

H.e.f., Andrezieux Boutheon, FR;

Luxembourg Institute of Science and Technology (List), Esch-sur-Alzette, LU;

Inventors:

Patrick Choquet, Longeville les Metz, FR;

David Duday, Luxembourg, LU;

Olivier Blandenet, Meylan, FR;

Thierry Leon Lagarde, Vif, FR;

Assignees:

H.E.F, Andrezieux Boutheon, FR;

LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette, LU;

Attorney:

Heslin Rothenberg Farley & Mesiti P.C.

Primary Examiner:

Rakesh K Dhingra

Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01J 37/32 (2006.01); C23C 16/511 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32192 (2013.01); C23C 16/511 (2013.01); H01J 37/3244 (2013.01); H01J 37/32403 (2013.01); H01J 37/32513 (2013.01); H01J 37/32678 (2013.01); H01J 37/32733 (2013.01); H01J 2237/3321 (2013.01);
Abstract

According to the process, the filiform component is continuously linearly moved through magnetic dipoles arranged opposite each other and around a tube constituting a treatment chamber, and the microwave energy is introduced between at least two magnetic dipoles.

Find Patent Forward Citations

Quick Actions:

Choquet, Patrick. (2019). Method and device for generating a plasma excited by a microwave energy in the electron cyclotron resonance (ecr) domain, in order to carry out a surface treatment or produce a coating around a filiform element (U.S. Patent No. 10283322). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10283322

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