The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Jun. 12, 2017
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Taewoo Kim, Seoul, KR;
Eunjung Kim, Suwon-si, KR;
Seung-Won Park, Seoul, KR;
Daehwan Jang, Seoul, KR;
Hyungbin Cho, Seongnam-si, KR;
Gugrae Jo, Asan-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/22 (2006.01); G03F 7/00 (2006.01); G03F 7/038 (2006.01); G03F 7/09 (2006.01); G03F 7/095 (2006.01); G03F 7/16 (2006.01); G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); G03F 7/0035 (2013.01); G03F 7/038 (2013.01); G03F 7/094 (2013.01); G03F 7/095 (2013.01); G03F 7/16 (2013.01); G03F 7/22 (2013.01); G03F 7/26 (2013.01);
Abstract
A method of manufacturing an imprint master template including forming a first layer pattern only in a partial region and a second layer formed in the entire region, and then a back exposure process is performed.