The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2019

Filed:

Oct. 29, 2015
Applicant:

Nippon Light Metal Company, Ltd., Tokyo, JP;

Inventors:

Hayato Kiyomi, Shizuoka, JP;

Naoto Komura, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/64 (2012.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); G03F 1/62 (2013.01); H01L 21/027 (2013.01);
Abstract

A support frame for a pellicle, in which a pellicle film is adhered to the front surface of an aluminum-alloy frame body, and a transparent substrate is adhered to the rear surface of the frame body. A recessed groove is formed in the rear surface of the frame body, the recessed groove extending along the periphery of the frame body, and a vent hole is formed from the outer peripheral surface of the frame body to the inner surface of the recessed groove. With this configuration, deformation of the support frame can be suppressed when the support frame is removed from the transparent substrate.


Find Patent Forward Citations

Kiyomi, Hayato. (2019). Support frame for pellicle (U.S. Patent No. 10281814). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10281814

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…