The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Aug. 08, 2011
Applicant:
Mitsunori Toyoda, Miyagi, JP;
Inventor:
Mitsunori Toyoda, Miyagi, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 5/30 (2006.01); G02B 27/09 (2006.01); G02B 27/28 (2006.01); G02B 27/42 (2006.01);
U.S. Cl.
CPC ...
G02B 5/3025 (2013.01); G02B 27/0927 (2013.01); G02B 27/0944 (2013.01); G02B 27/28 (2013.01); G02B 27/4233 (2013.01); G02B 27/4261 (2013.01); G03F 7/70091 (2013.01); G03F 7/70108 (2013.01); G03F 7/70158 (2013.01); G03F 7/70566 (2013.01);
Abstract
An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.