The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Jan. 26, 2017
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Andreas Haeffelin, Vaihingen, DE;
Harald Guenschel, Gerach, DE;
Janine Riedrich-Moeller, Weil Der Stadt, DE;
Marcus Ahles, Pfullingen, DE;
Assignee:
ROBERT BOSCH GMBH, Stuttgart, DE;
Primary Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); G01M 15/10 (2006.01); G01N 27/407 (2006.01); G01N 27/41 (2006.01); G01N 27/419 (2006.01);
U.S. Cl.
CPC ...
G01M 15/104 (2013.01); G01N 27/407 (2013.01); G01N 27/4071 (2013.01); G01N 27/41 (2013.01); G01N 27/419 (2013.01); G01N 33/0036 (2013.01); G01N 33/0037 (2013.01);
Abstract
A semiconductor sensor includes a cavity; a fluid connection between the cavity and an inlet area; a pump diaphragm that bounds the cavity; and a measuring diaphragm that bounds the cavity. The fluid connection includes a diffusion channel having multiple openings in the inlet area or multiple diffusion channels having respectively an opening in the inlet area, and it is possible to close at least one of the openings using laser light in order to influence an effective length or an effective cross section of the fluid connection.