The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Aug. 15, 2016
Applicant:
Arm Ltd., Cambridge, GB;
Inventors:
Kimberly Gay Reid, Austin, TX (US);
Lucian Shifren, San Jose, CA (US);
Assignee:
ARM Ltd., Cambridge, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); C23C 16/455 (2006.01); C23C 16/48 (2006.01);
U.S. Cl.
CPC ...
H01L 45/1608 (2013.01); C23C 16/45527 (2013.01); C23C 16/482 (2013.01); H01L 45/1233 (2013.01); H01L 45/146 (2013.01); H01L 45/1616 (2013.01);
Abstract
Subject matter disclosed herein may relate to fabrication of correlated electron materials used, for example, to perform a switching function. In embodiments, processes are described, in which an ultraviolet light source is utilized during fabrication of a correlated electron material. In embodiments, use of ultraviolet light may decrease a likelihood of diffusion of atomic and/or molecular components of a substrate that may bring about undesirable electrical performance of a CEM device.