The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Jun. 15, 2016
Applicant:
Apple Inc., Cupertino, CA (US);
Inventors:
Hyeun-Su Kim, Palo Alto, CA (US);
Dariusz Golda, Redwood City, CA (US);
John A. Higginson, Santa Clara, CA (US);
Assignee:
Apple Inc., Cupertino, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B81C 99/00 (2010.01); H02N 13/00 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B81C 99/002 (2013.01); B25J 15/0085 (2013.01); H01L 2221/68363 (2013.01); H01L 2924/12041 (2013.01); H02N 13/00 (2013.01);
Abstract
A compliant electrostatic transfer head and array are described. In an embodiment a compliant electrostatic transfer head includes a base substrate, and a plurality of interdigitated spring electrodes that are deflectable together into a cavity toward the base substrate. Each spring electrode includes mesa structure, and the mesa structures of the plurality of interdigitated spring electrodes are aligned.