The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Mar. 31, 2016
Applicant:
Tdk Corporation, Minato-ku, Tokyo, JP;
Inventors:
Takuya Kudo, Tokyo, JP;
Toshihiko Miyajima, Tokyo, JP;
Assignee:
TDK CORPORATION, Minato-ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); B08B 9/093 (2006.01); H01L 21/67 (2006.01); B08B 5/02 (2006.01); B05B 1/00 (2006.01); B05B 1/34 (2006.01); H01L 21/677 (2006.01); B08B 9/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/67772 (2013.01); B08B 9/00 (2013.01); H01L 21/67775 (2013.01);
Abstract
A gas purge unit introduces a cleaning gas into a container with a main opening there through for taking a housed object in and out. The gas purge unit includes a blowout member and a supply portion. The blowout member with a cylindrical shape has an elongated hollow extending in a longitudinal direction and a discharge portion of a porous body connecting between the elongated hollow and the outside to discharge the cleaning gas. The supply portion is connected to the elongated hollow through a connection hole formed at one end of the blowout member to supply the cleaning gas to the elongated hollow.