The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Jul. 27, 2011
Edwin Pink, Chur, CH;
Philipp Hotz, Chur, CH;
Edwin Pink, Chur, CH;
Philipp Hotz, Chur, CH;
TEL SOLAR AG, Trubbach, CH;
Abstract
The invention relates to a vacuum processing system for processing a substrate (), with an enclosure () for carrying the substrate () to be treated in a substrate plane (), whereby the enclosure () comprises a first reflecting means () and a heating means () having a first plane surface () and an opposed second plane surface (), the heating means () is configured for irradiating heating energy only via the first surface () and/or via the second surface (), the first reflecting means () is configured for reflecting the heating energy irradiated by the heating means () onto the substrate plane (), and the heating means () is arranged such that the first surface () faces towards the first reflecting means () and the second surface () faces towards the substrate plane ().