The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Nov. 02, 2012
Nhk Spring Co., Ltd., Yokohama-shi, Kanagawa, JP;
Toshihiro Tachikawa, Isehara, JP;
Junichi Miyahara, Isehara, JP;
Kazuhiro Yonekura, Isehara, JP;
Toshihiko Hanamachi, Isehara, JP;
Go Takahara, Isehara, JP;
Jun Futakuchiya, Isehara, JP;
Daisuke Hashimoto, Santa Clara, CA (US);
NHK SPRING CO., LTD., Kanagawa, JP;
Abstract
A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.