The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

Nov. 29, 2013
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Tsubasa Hirose, Hamamatsu, JP;

Yuu Takiguchi, Hamamatsu, JP;

Yasunori Igasaki, Hamamatsu, JP;

Hideki Shimoi, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/53 (2014.01); B23K 26/55 (2014.01); B23K 26/38 (2014.01); H01L 21/268 (2006.01); H01L 21/67 (2006.01); B23K 26/06 (2014.01); B23K 26/00 (2014.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0006 (2013.01); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/38 (2013.01); B23K 26/53 (2015.10); B23K 26/55 (2015.10); H01L 21/67115 (2013.01); B23K 2103/50 (2018.08);
Abstract

A laser processing apparatusis an apparatus for forming a modified region R in an object to be processed S by irradiating the object S with laser light L. The laser processing apparatuscomprises a laser light sourcethat emits the laser light L, a mount tablethat supports the object S, and an optical systemthat converges a ring part surrounding a center part including an optical axis of the laser light L in the laser light L emitted from the laser light sourceat a predetermined part of the object S supported by the mount table. The optical systemadjusts a form of at least one of inner and outer edges of the ring part of the laser light L according to a position of the predetermined part in the object S.


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