The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Dec. 29, 2015
Applicant:
Georgia Tech Research Corporation, Atlanta, GA (US);
Inventors:
Michael A. Filler, Atlanta, GA (US);
Sven Holger Behrens, Atlanta, GA (US);
Laurens Victor Breedveld, Atlanta, GA (US);
Assignee:
Georgia Tech Research Corporation, Atlanta, GA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/04 (2006.01); C23C 16/44 (2006.01); C23C 16/442 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02653 (2013.01); C23C 16/045 (2013.01); C23C 16/442 (2013.01); C23C 16/4417 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02603 (2013.01); H01L 21/02606 (2013.01); H01L 21/02645 (2013.01); H01L 21/02543 (2013.01); H01L 21/02546 (2013.01);
Abstract
A method for forming nanostructures including introducing a hollow shell into a reactor. The hollow shell has catalyst nanoparticles exposed on its interior surface. The method also includes introducing a precursor into the reactor to grow nanostructures from the interior surface of the hollow shell from the catalyst nanoparticles.