The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Nov. 06, 2018
Newpowerplasma Co., Ltd., Pyoungtak-si, Gyeonggi-do, KR;
Sungkyunkwan University Research & Business Foundation, Suwon-si, Gyeonggi-do, KR;
Jongwoon Kim, Hwaseong-si, KR;
Eunmin Jeon, Asan-si, KR;
Youngchul Kim, Osan-si, KR;
Minjae Kim, Osan-si, KR;
NEWPOWERPLASMA CO., LTD., Pyoungtak-si, Gyeonggi-do, KR;
Sungkyunkwan University Research & Business Foundation, Suwon-si, Gyeonggi-do, KR;
Abstract
Provided is a high-frequency power generator with an enhanced pulse function, which supplies high-frequency power to a plasma load. The high-frequency power generator may include: a rectifier configured to receive AC power and rectify the received AC power; a DC-DC converter configured to adjust an output voltage by switching an output of the rectifier; an RF power amplifier configured to amplify an output of the DC-DC converter, and transfer high-frequency power with a pulse waveform to the plasma load; an RF power controller configured to control the output and pulse waveform of the RF power amplifier; and a DC-DC converter controller configured to receive a pulse signal from the RF power controller, and control a duty ratio of switching elements constituting the DC-DC converter.