The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Jun. 25, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Hiroyuki Ozaki, Yokohama, JP;
Kenji Tamamori, Ebina, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Provided is a technology that realizes a variable shape mirror using an actuator having a comb electrode structure, which can be relatively easily manufactured and displaced in two (±) directions perpendicular to a mirror reference plane. A variable shape mirror () includes: a mirror base () including a reflective surface (); and an actuator () including a first actuator and a second actuator. Each of the plurality of actuators is connected to the mirror base via a connecting portion (). The first actuator has a first electrode pair () of a comb electrode structure for displacing the connecting portion in a first direction perpendicular to the reflective surface. The second actuator has a second electrode pair () of a comb electrode structure for displacing the connecting portion in a second direction opposite to the first direction, the second electrode pair being separately formed from the first electrode pair.