The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Nov. 09, 2015
Applicant:
Imt Co., Ltd., Suwon-si, KR;
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01R 3/00 (2006.01); G01R 1/073 (2006.01); H05K 1/00 (2006.01); G01R 1/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
G01R 3/00 (2013.01); G01R 1/07314 (2013.01); G01R 1/00 (2013.01); H01L 21/687 (2013.01); H01L 2221/00 (2013.01); H05K 1/00 (2013.01);
Abstract
A wafer test machine is disclosed. The wafer test machine comprises a main body having a chamber defined therein, wherein a probe card is disposed at an upper portion of the chamber; a chuck for fixing a wafer in the chamber; a moving unit for moving the chuck in the chamber, thus making a contact between the probe card and the wafer; and a laser cleaning apparatus for cleaning the probe card in the chamber using a laser beam, when the probe card does not contact the wafer.