The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
May. 30, 2014
Honda Motor Co., Ltd., Tokyo, JP;
Koji Kobayashi, Tochigi, JP;
Junya Funatsu, Tochigi, JP;
HONDA MOTOR CO., LTD., Tokyo, JP;
Abstract
The present invention provides a method for cleaning a carbon coating film, which can clean the carbon coating film that is formed on each portion of a plasma CVD device, and provides the plasma CVD device. The plasma CVD deviceincludes: first and second sealing membersandwhich are formed of insulators and seal both ends of a workpiece W or a dummy workpiece W', respectively; an anode; decompression unitswhich decompress the inside of the workpiece W or the dummy workpiece W′; a source-gas supply unitwhich supplies a source gas to the inside of the workpiece W; a power source; and an oxygen-gas supply unitwhich supplies oxygen gas to the inside of the dummy workpiece W′.