The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Feb. 16, 2017
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventor:
Takeshi Sakashita, Tokyo, JP;
Assignee:
TAIYO YUDEN CO., LTD, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 9/56 (2006.01); H03H 9/54 (2006.01); H03H 9/70 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01);
U.S. Cl.
CPC ...
H03H 9/171 (2013.01); H03H 3/02 (2013.01); H03H 9/131 (2013.01); H03H 9/173 (2013.01); H03H 9/54 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 9/70 (2013.01); H03H 2003/021 (2013.01);
Abstract
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film that is located on the substrate; a lower electrode that is located on the substrate through an air gap, makes contact with the piezoelectric film, and includes a thin film part and a thick film part in which a distance from the air gap to a surface making contact with the piezoelectric film is greater than that of the thin film part in a region overlapping with the air gap in plan view; and an upper electrode that is located on an opposite surface of the piezoelectric film from a surface making contact with the lower electrode.