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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10269597 B1

PDFFull Text
Date of Patent:
Apr. 23, 2019

Filed:

May. 19, 2017

Manufacturing apparatus of light-emitting element

Applicant:

Japan Display Inc., Tokyo, JP;

Inventors:

Takaaki Ishikawa, Tokyo, JP;

Takaaki Kamimura, Tokyo, JP;

Noriyuki Hirata, Tokyo, JP;

Assignee:

Japan Display Inc., Tokyo, JP;

Attorney:

Typha IP LLC

Primary Examiner:

Stephen W Smoot

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 51/50 (2006.01); H01L 51/00 (2006.01); H01L 21/677 (2006.01); G05B 19/418 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67155 (2013.01); G05B 19/41865 (2013.01); H01L 21/67121 (2013.01); H01L 21/67132 (2013.01); H01L 21/67138 (2013.01); H01L 21/67144 (2013.01); H01L 21/67161 (2013.01); H01L 21/67173 (2013.01); H01L 21/67184 (2013.01); H01L 21/67207 (2013.01); H01L 21/67236 (2013.01); H01L 21/67745 (2013.01); H01L 51/0002 (2013.01); H01L 51/504 (2013.01); H01L 51/5012 (2013.01); H01L 51/5068 (2013.01); H01L 51/5084 (2013.01); H01L 51/56 (2013.01); H01L 2224/80 (2013.01);
Abstract

Disclosed is a manufacturing apparatus of a light-emitting element. The manufacturing apparatus includes: a main transporting route including a first transfer device and a second transfer device connected to each other through a first transporting chamber; a sub-transporting route extending in a direction intersecting the main transporting route, the sub-transporting route including: a second transporting chamber connected to the first transfer device or the second transfer device; and a delivery chamber connected to the second transporting chamber; and a plurality of treatment chambers connected to the delivery chamber. A region to which the first transfer device, the second transfer device, the first transporting chamber, and the second transporting chamber are connected is under a continuous vacuum environment.

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