The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 23, 2019

Filed:

Oct. 11, 2016
Applicant:

Veeco Instruments Inc., Plainview, NY (US);

Inventors:

Ian Kunsch, Somerset, NJ (US);

Brett Stuart Snowden, Manasquan, NJ (US);

Gregory Williams, Jersey City, NJ (US);

David Gant, South River, NJ (US);

Aaron Frazier, Frenchtown, NJ (US);

Assignee:

VEECO INSTRUMENTS INC., Plainview, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16J 15/10 (2006.01); H01L 21/67 (2006.01); F16J 15/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67126 (2013.01); F16J 15/022 (2013.01); F16J 15/025 (2013.01); H01L 21/6719 (2013.01);
Abstract

A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.


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