The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Jul. 06, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Nam Hoon Lee, Ansan-si, KR;
Jungwoo Seo, Hwaseong-si, KR;
Joonghan Shin, Yongin-si, KR;
Byung Joo Oh, Seoul, KR;
Jeongmin Lee, Suwon-si, KR;
Gi-Nam Park, Incheon, KR;
Jonghyun Lee, Bucheon-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/00 (2006.01); F21V 9/00 (2018.01); G02B 5/00 (2006.01); G02B 5/20 (2006.01); C23C 14/48 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); C23C 14/48 (2013.01); G02B 5/003 (2013.01); G02B 5/205 (2013.01); H01L 21/6875 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H05B 3/0047 (2013.01);
Abstract
A transparent plate and a substrate processing system including the same are disclosed. The substrate processing system may include a chamber, a lamp provided below the chamber, and a plate provided in the chamber to load a substrate. The plate may include a center region having a first transmittance value and an edge region having with a second transmittance value higher than the first transmittance value.