The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 23, 2019

Filed:

Jan. 09, 2015
Applicants:

Swegan Ab, Linköping, SE;

Ole Bokinge;

Inventors:

Erik Janzén, Linköping, SE;

Jr-Tai Chen, Vikingstad, SE;

Assignee:

SWEGAN AB, Linkoping, SE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02694 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02378 (2013.01); H01L 21/02458 (2013.01); H01L 21/02631 (2013.01); H01L 21/02661 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01); H01L 29/7787 (2013.01); H01L 29/778 (2013.01);
Abstract

The present document discloses a semiconductor device structure () comprising a SiC substrate (), an InAlGaN buffer layer (), wherein x1=0-1, y1=0-1 and x1+y1=1, and an InAlGaN nucleation layer (), wherein x2=0-1, y2=0-1 and x2+y2=1, sandwiched between the SiC substrate () and the buffer layer (). The buffer layer () presents a rocking curve with a (102) peak having a FWHM below 250 arcsec, and the nucleation layer () presents a rocking curve with a (105) peak having a FWHM below 200 arcsec, as determined by X-ray Diffraction (XRD). Methods of making such a semiconductor device structure are disclosed.


Find Patent Forward Citations

Janzén, Erik. (2019). Semiconductor device structure and methods of its production (U.S. Patent No. 10269565). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10269565

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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