The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Mar. 02, 2017
Applicant:
Sensirion Ag, Stäfa, CH;
Inventors:
Assignee:
Sensirion AG, Stäfa, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/43 (2006.01); G01N 27/22 (2006.01);
U.S. Cl.
CPC ...
G01N 27/225 (2013.01); H01L 29/43 (2013.01);
Abstract
A method for fabrication of a sensor device () for measuring a parameter of a test substance, comprising: i) providing a substrate; ii) arranging on its front side a structured first protection layer (); iii) arranging on the substrate with the structured first protection layer () a stack including first and second electrodes (), a sacrificial layer between the first and second electrodes (); and iv) etching in an etching step from the back side through the substrate such as to remove material of the semiconductor substrate and the sacrificial layer. The present invention also relates to such a sensor device ().