The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Apr. 09, 2015
Applicant:
Jx Nippon Mining & Metals Corporation, Tokyo, JP;
Inventors:
Gaku Kanou, Ibaraki, JP;
Tatsuya Omori, Ibaraki, JP;
Assignee:
JX Nippon Mining & Metals Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25B 1/26 (2006.01); C01G 3/05 (2006.01); C23C 16/08 (2006.01); C25B 9/10 (2006.01); C25B 13/02 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C25B 1/26 (2013.01); C01G 3/05 (2013.01); C23C 16/08 (2013.01); C25B 9/10 (2013.01); C25B 13/02 (2013.01); H01L 21/28556 (2013.01); C01P 2006/80 (2013.01);
Abstract
Provided are: copper chloride which can provide an organometallic complex that contains impurities at a small content and therefore has high purity; a CVD raw material; a copper wiring film; and a method for producing copper chloride. Copper chloride which has purity of 6 N or more and has an Ag content of 0.5 wtppm or less.