The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Aug. 23, 2016
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Eric Madsen, Sherwood, OR (US);
Kurt Kern, San Jose, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 20/12 (2006.01); C23C 16/455 (2006.01); B23K 20/24 (2006.01); C23C 16/505 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); B23K 20/1205 (2013.01); B23K 20/129 (2013.01); B23K 20/24 (2013.01); C23C 16/505 (2013.01);
Abstract
A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.